Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair
The slip mechanism between the chunk and wafer during TMG high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear.Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC sliders on single-crystal silicon substrates.Th